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2 inch C-plane
Property
 Specification
Surface Orientation
 C-plane (0001)
M-axis Tilt Angle
 0.0 ± 0.1˚, 0.2(0.3) ± 0.05˚
Diameter
 50.8 ± 0.1mm
Thickness
 0.430 ± 0.025mm
Bow
 ≤ 10 - 20 microns
TTV
 ≤ 5 - 15 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚
Flat Length
 16.5 ± 0.8mm
Front Surface Finish
 Epi-ready or Dummy grade
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
2 inch A-plane
Property
 Specification
Surface Orientation
 A-plane (11-20)
M-axis Tilt Angle
 0.0 ± 0.1˚
C-axis Tilt Angle
 0.0 ± 0.1˚
Diameter
 50.8 ± 0.1mm
Thickness
 0.430 ± 0.025mm
Bow
 ≤ 10 microns
TTV
 ≤ 5 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 C-plane(0001) ± 0.3˚
Flat Length
 16.0 ± 0.8mm
Front Surface Finish
 Epi-ready
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
2 inch R-plane
Property
 Specification
Surface Orientation
 R-plane (1-102)
Diameter
 50.8 ± 0.1mm
Thickness
 0.430 ± 0.025mm
Bow
 ≤ 10 microns
TTV
 ≤ 5 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚
Flat Length
 16.0 ± 0.8mm
Front Surface Finish
 Epi-ready
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
2 inch M-plane
Property
 Specification
Surface Orientation
 M-plane (10-10)
Diameter
 50.8 ± 0.1mm
Thickness
 0.430 ± 0.025mm
Bow
 ≤ 10 microns
TTV
 ≤ 5 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚
Flat Length
 16.0 ± 0.8mm
Front Surface Finish
 Epi-ready
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
3 inch C-plane
Property
 Specification
Surface Orientation
 C-plane (0001)
M-axis Tilt Angle
 0.0 ± 0.1˚, 0.2(0.3) ± 0.05˚
Diameter
 76.2 ± 0.1mm
Thickness
 0.550 ± 0.025mm
Bow
 ≤ 10 microns
TTV
 ≤ 5 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚
Flat Length
 22.0 ± 0.8mm
Front Surface Finish
 Epi-ready or Dummy grade
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
4 inch C-plane
Property
 Specification
Surface Orientation
 C-plane (0001)
M-axis Tilt Angle
 0.0 ± 0.1˚, 0.2(0.3) ± 0.05˚
Diameter
 100.0 ± 0.1mm
Thickness
 0.650 ± 0.025mm
Bow
 ≤ 10 microns
TTV
 ≤ 10 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚
Flat Length
 32.5 ± 0.8mm
Front Surface Finish
 Epi-ready or Dummy grade
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request
6 inch C-plane
Property
 Specification
Surface Orientation
 C-plane (0001)
M-axis Tilt Angle
 0.0 ± 0.1˚, 0.2(0.3) ± 0.05˚
Diameter
 150.0 ± 0.1mm
Thickness
 1.30 ± 0.025mm
Bow
 ≤ 15 microns
TTV
 ≤ 15 microns
Roughness (Ra)
 ≤ 0.3 nm
Orientation Flat
 A-plane(11-20) ± 0.3˚/Notch upon request
Flat Length
 22.5 ± 1.0mm or 50.0 ± 1.5mm
Front Surface Finish
 Epi-ready or Dummy grade
Back Surface Finish
 As-lapped (SSP) or Epi-ready (DSP)
Remarks
 All specifications above can be customized upon your request